Organization

Il-Sug Chung (Chair): Min-Suk Kwon (Committee Member); Je-Hyung Kim (Committee Member); Kibog Park (Committee Member); Jongwon Lee (Committee Member); Kwanyong Seo (Dean, Office of Research Facilities and Training (ResFacT)); Kyung-Sun Lee (Team Leader, Fabrication and Manufacturing Support Team

Division	Name	Equipment
Thin Film	Hyung Il Kim	Sputtering system(DC, RF, HSC)
	Hae Ra Kang	LP-CVD(Poly/Nitride, TEOS), Furnace(Wet, Dry), PECVD, AFM
	Bo Seong Kim	E-beam evaporator, ALD, PECVD
Etching	Kang Oh Kim	Dielectric RIE, Metal RIE, CCP etcher, RTP, Surface profiler
	MIN JAE KIM	Dielectric ICP etcher, Metal ICP etcher, FIB NX2000
	Seon jin Lee	Deep Si etcher, NLD etcher, Dicing Saw, CMP
Photolithography	Lu Da Lee	E-beam lithography(JEOL, NBL)
	Eun Jeong Hwang	Laser lithography Probe station, Wire bonder, Photoresist Track system
	Song Hee Lee	E-beam lithography #attached, Mask aligner(MA6, MDA-400S)