Existing Equipment

Mask aligner 1

• FIELDPhoto
• MODELMA/BA6-8
• MAKERSuss Microtec

Reserve Equipment

E-Beam lithography 2 ( FE-SEM attachment )

• FIELDPhoto
• MODELSU5000 / ELPHY Multibeam
• MAKERRaith

Reserve Equipment

E-Beam lithography 1

• FIELDPhoto
• MODELNB3
• MAKERNBL

Reserve Equipment

Mask aligner 2

• FIELDPhoto
• MODELMA6
• MAKERSuss Microtec

Reserve Equipment

Mask aligner 3

• FIELDPhoto
• MODELMDA-400S
• MAKERMIDAS

Reserve Equipment

Maskless laser writer

• FIELDPhoto
• MODELPicomaster200
• MAKERRaith

Reserve Equipment

Track

• FIELDPhoto
• MODELSSP200
• MAKERSVS

Reserve Equipment

Spin coater

• FIELDPhoto
• MODELSPIN-3000A
• MAKERMIDAS

Reserve Equipment