보유장비

기보유 장비_old

E-Beam lithography 1
  • FIELDPhoto
  • MODELNB3
  • MAKERNBL
E-Beam lithography 2 ( FE-SEM attachment )
  • FIELDPhoto
  • MODELSU5000 / ELPHY Multibeam
  • MAKERRaith
Mask aligner 1
  • FIELDPhoto
  • MODELMA/BA6-8
  • MAKERSuss Microtec
Mask aligner 2
  • FIELDPhoto
  • MODELMA6
  • MAKERSuss Microtec
Mask aligner 3
  • FIELDPhoto
  • MODELMDA-400S
  • MAKERMIDAS
Maskless laser writer
  • FIELDPhoto
  • MODELPicomaster200
  • MAKERRaith
Track
  • FIELDPhoto
  • MODELSSP200
  • MAKERSVS
Spin coater
  • FIELDPhoto
  • MODELSPIN-3000A
  • MAKERMIDAS
Dielectric RIE
  • FIELDEtching
  • MODELLabstar
  • MAKERTTL
Metal ICP 1
  • FIELDEtching
  • MODELFABStar
  • MAKERTTL
Metal ICP 2
  • FIELDEtching
  • MODELICP380
  • MAKEROxford instruments
Dielectric ICP
  • FIELDEtching
  • MODELFABstar
  • MAKERTTL
CCP Etcher
  • FIELDEtching
  • MODELTelius
  • MAKERTEL
Deep RIE
  • FIELDEtching
  • MODELTegal 200
  • MAKERTegal France
Plasma Treatment
  • FIELDEtching
  • MODELV15-G
  • MAKERPlasma Finish
PR Stripper
  • FIELDEtching
  • MODELPTP300
  • MAKERPINK
Wet station_Acid 1
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Acid 2
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Acid 3
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station Alkari
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Solvent 1
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Solvent 2
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
E-Beam evaporator 1
  • FIELDThinfilm
  • MODELFC-2000
  • MAKERTemescal
E-Beam evaporator 2
  • FIELDThinfilm
  • MODELWC-4000
  • MAKERWOOSUNG Hi-vac
RF Sputter
  • FIELDThinfilm
  • MODELSRN-120
  • MAKERSORONA
DC Sputter
  • FIELDThinfilm
  • MODELSRN-120
  • MAKERSORONA
HSC Sputter
  • FIELDThinfilm
  • MODELSRN-130
  • MAKERSORONA
Thermal ALD
  • FIELDThinfilm
  • MODELLucida D100
  • MAKERNCD
Cluster ALD
  • FIELDThinfilm
  • MODELAtomic premium
  • MAKERCN1
PE-CVD 1
  • FIELDThinfilm
  • MODELPEH-600
  • MAKERSORONA
PE-CVD 2
  • FIELDThinfilm
  • MODELPEH-600
  • MAKERSORONA
PE-CVD 2 ( SiC )
  • FIELDThinfilm
  • MODELFABStar+
  • MAKERTTL
Auto parylene coater
  • FIELDThinfilm
  • MODELNRPC-500
  • MAKERNuriTech
Furnace ( Dry )
  • FIELDDiffusion
  • MODELKHD-306
  • MAKERKSM
Furnace ( Wet )
  • FIELDDiffusion
  • MODELKHD-306
  • MAKERKSM
LP-CVD ( Nit, Poly )
  • FIELDThinfilm
  • MODELKVL-206
  • MAKERKSM
LP-CVD ( TEOS )
  • FIELDThinfilm
  • MODELVULCAN-V61RL
  • MAKERLEAD Engineering
RTP
  • FIELDDiffusion
  • MODELAW610
  • MAKERAllwin21
Dicing saw
  • FIELDPackaging
  • MODELNDS-1012
  • MAKERNeonTech
CMP
  • FIELDPackaging
  • MODELORBIS
  • MAKERLogitech
Lapping
  • FIELDPackaging
  • MODELLP70
  • MAKERLogitech
Wire bonder
  • FIELDPackaging
  • MODELHB05
  • MAKERTPT
Surface profiler
  • FIELDMeasurement
  • MODELP6
  • MAKERKLA Tencor
3D profiler
  • FIELDMeasurement
  • MODELMicroXAM-800
  • MAKERKLA
Inspection Microscope
  • FIELDMeasurement
  • MODELDM 4000M
  • MAKERLEICA Microsystems
Measurement Microscope
  • FIELDMeasurement
  • MODELAxio Scope A1
  • MAKERZEISS
Ellipsometer
  • FIELDMeasurement
  • MODELElli-SE-UaM8
  • MAKERElipso Technology
Probe station
  • FIELDMeasurement
  • MODELCRX-4K
  • MAKERLakeshore
4 point probe
  • FIELDMeasurement
  • MODELCMT2000N
  • MAKERAIT
Thickness measure
  • FIELDMeasurement
  • MODELST4000-DLX
  • MAKERK-MAC
Normal SEM
  • FIELDMeasurement
  • MODELS-3400N ( Type Ⅱ )
  • MAKERHitach High-Technologies
AFM
  • FIELDMeasurement
  • MODELMultiMode V
  • MAKERVeeco
FIB
  • FIELDMeasurement
  • MODELNX2000
  • MAKERHitachi
Cold FE-SEM
  • FIELDElectron Microscopy
  • MODELS-4800
  • MAKERHitachi High-Technologies
CS-STEM
  • FIELDElectron Microscopy
  • MODELJEM-ARM300F
  • MAKERJEOL
XPS
  • FIELDSurface Analysis
  • MODELK-alpha
  • MAKERThermoFisher
E-Beam lithography 1
  • FIELDPhoto
  • MODELNB3
  • MAKERNBL
E-Beam lithography 2 ( FE-SEM attachment )
  • FIELDPhoto
  • MODELSU5000 / ELPHY Multibeam
  • MAKERRaith
Mask aligner 1
  • FIELDPhoto
  • MODELMA/BA6-8
  • MAKERSuss Microtec
Mask aligner 2
  • FIELDPhoto
  • MODELMA6
  • MAKERSuss Microtec
Mask aligner 3
  • FIELDPhoto
  • MODELMDA-400S
  • MAKERMIDAS
Maskless laser writer
  • FIELDPhoto
  • MODELPicomaster200
  • MAKERRaith
Track
  • FIELDPhoto
  • MODELSSP200
  • MAKERSVS
Spin coater
  • FIELDPhoto
  • MODELSPIN-3000A
  • MAKERMIDAS
Dielectric RIE
  • FIELDEtching
  • MODELLabstar
  • MAKERTTL
Metal ICP 1
  • FIELDEtching
  • MODELFABStar
  • MAKERTTL
Metal ICP 2
  • FIELDEtching
  • MODELICP380
  • MAKEROxford instruments
Dielectric ICP
  • FIELDEtching
  • MODELFABstar
  • MAKERTTL
CCP Etcher
  • FIELDEtching
  • MODELTelius
  • MAKERTEL
Deep RIE
  • FIELDEtching
  • MODELTegal 200
  • MAKERTegal France
Plasma Treatment
  • FIELDEtching
  • MODELV15-G
  • MAKERPlasma Finish
PR Stripper
  • FIELDEtching
  • MODELPTP300
  • MAKERPINK
Wet station_Acid 1
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Acid 2
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Acid 3
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station Alkari
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Solvent 1
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
Wet station_Solvent 2
  • FIELDEtching
  • MODELWet station
  • MAKERDonghoon tech
E-Beam evaporator 1
  • FIELDThinfilm
  • MODELFC-2000
  • MAKERTemescal
E-Beam evaporator 2
  • FIELDThinfilm
  • MODELWC-4000
  • MAKERWOOSUNG Hi-vac
RF Sputter
  • FIELDThinfilm
  • MODELSRN-120
  • MAKERSORONA
DC Sputter
  • FIELDThinfilm
  • MODELSRN-120
  • MAKERSORONA
HSC Sputter
  • FIELDThinfilm
  • MODELSRN-130
  • MAKERSORONA
Thermal ALD
  • FIELDThinfilm
  • MODELLucida D100
  • MAKERNCD
Cluster ALD
  • FIELDThinfilm
  • MODELAtomic premium
  • MAKERCN1
PE-CVD 1
  • FIELDThinfilm
  • MODELPEH-600
  • MAKERSORONA
PE-CVD 2
  • FIELDThinfilm
  • MODELPEH-600
  • MAKERSORONA
PE-CVD 2 ( SiC )
  • FIELDThinfilm
  • MODELFABStar+
  • MAKERTTL
Auto parylene coater
  • FIELDThinfilm
  • MODELNRPC-500
  • MAKERNuriTech
LP-CVD ( Nit, Poly )
  • FIELDThinfilm
  • MODELKVL-206
  • MAKERKSM
LP-CVD ( TEOS )
  • FIELDThinfilm
  • MODELVULCAN-V61RL
  • MAKERLEAD Engineering
Furnace ( Dry )
  • FIELDDiffusion
  • MODELKHD-306
  • MAKERKSM
Furnace ( Wet )
  • FIELDDiffusion
  • MODELKHD-306
  • MAKERKSM
RTP
  • FIELDDiffusion
  • MODELAW610
  • MAKERAllwin21
Dicing saw
  • FIELDPackaging
  • MODELNDS-1012
  • MAKERNeonTech
CMP
  • FIELDPackaging
  • MODELORBIS
  • MAKERLogitech
Lapping
  • FIELDPackaging
  • MODELLP70
  • MAKERLogitech
Wire bonder
  • FIELDPackaging
  • MODELHB05
  • MAKERTPT
Surface profiler
  • FIELDMeasurement
  • MODELP6
  • MAKERKLA Tencor
3D profiler
  • FIELDMeasurement
  • MODELMicroXAM-800
  • MAKERKLA
Inspection Microscope
  • FIELDMeasurement
  • MODELDM 4000M
  • MAKERLEICA Microsystems
Measurement Microscope
  • FIELDMeasurement
  • MODELAxio Scope A1
  • MAKERZEISS
Ellipsometer
  • FIELDMeasurement
  • MODELElli-SE-UaM8
  • MAKERElipso Technology
Probe station
  • FIELDMeasurement
  • MODELCRX-4K
  • MAKERLakeshore
4 point probe
  • FIELDMeasurement
  • MODELCMT2000N
  • MAKERAIT
Thickness measure
  • FIELDMeasurement
  • MODELST4000-DLX
  • MAKERK-MAC
Normal SEM
  • FIELDMeasurement
  • MODELS-3400N ( Type Ⅱ )
  • MAKERHitach High-Technologies
AFM
  • FIELDMeasurement
  • MODELMultiMode V
  • MAKERVeeco
FIB
  • FIELDMeasurement
  • MODELNX2000
  • MAKERHitachi
Cold FE-SEM
  • FIELDElectron Microscopy
  • MODELS-4800
  • MAKERHitachi High-Technologies
CS-STEM
  • FIELDElectron Microscopy
  • MODELJEM-ARM300F
  • MAKERJEOL
XPS
  • FIELDSurface Analysis
  • MODELK-alpha
  • MAKERThermoFisher