{"id":2500,"date":"2023-10-25T15:01:20","date_gmt":"2023-10-25T06:01:20","guid":{"rendered":"https:\/\/semi.unist.ac.kr\/eng\/?page_id=2500"},"modified":"2026-06-17T18:00:19","modified_gmt":"2026-06-17T09:00:19","slug":"overview","status":"publish","type":"page","link":"https:\/\/qnfab.unist.ac.kr\/eng\/overview\/","title":{"rendered":"Overview"},"content":{"rendered":"[vc_row row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221;][vc_column][vc_column_text]\n<div class=\"page_submenu\">\n<ul class=\"submenu\">\n<li><a href=\"\/eng\/welcome-message\/\">Welcome Message<\/a><\/li>\n<li><a href=\"\/eng\/organization\/\">Organization<\/a><\/li>\n<li><a href=\"\/eng\/overview\/\"><strong>Overview<\/strong><\/a><\/li>\n<li><a href=\"\/eng\/statistics\/\">Statistics<\/a><\/li>\n<\/ul>\n<\/div>\n[\/vc_column_text][\/vc_column][\/vc_row][vc_row row_type=&#8221;section&#8221; type=&#8221;grid&#8221; text_align=&#8221;left&#8221; video=&#8221;&#8221; el_class=&#8221;page_overview&#8221;][vc_column][vc_column_text el_class=&#8221;table_scroll&#8221;]\n<h3>Quantum-Nano FAB Center<\/h3>\n<table class=\"tbl_st3\">\n<colgroup>\n<col width=\"15%\" \/>\n<col width=\"15%\" \/>\n<col width=\"15%\" \/>\n<col width=\"15%\" \/>\n<col width=\"12%\" \/>\n<col width=\"12%\" \/>\n<col width=\"8%\" \/>\n<col width=\"8%\" \/> <\/colgroup>\n<thead>\n<tr>\n<th>Affiliation<\/th>\n<th>Category<\/th>\n<th>Personnel<\/th>\n<th>Location<\/th>\n<th colspan=\"4\">Cleanroom<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td class=\"border_bt\" rowspan=\"2\">UNIST<br \/>\nOffice of Research Facilities and Training<br \/>\nFabrication and Manufacturing Support Team<\/td>\n<td class=\"border_bt\" rowspan=\"2\">Quantum-Nano FAB<\/td>\n<td class=\"border_bt\" rowspan=\"2\">Director (Team Leader): 1<br \/>\nDirector (Team Leader): 1<\/td>\n<td class=\"border_bt\" rowspan=\"2\">UNIST<br \/>\nBuilding 108, B1<\/td>\n<td class=\"border_db_bt\"><strong>Area<\/strong><\/td>\n<td class=\"border_db_bt\"><strong>Cleanliness<\/strong><\/td>\n<td class=\"border_db_bt\"><strong>Temperature<\/strong><\/td>\n<td class=\"border_db_bt\"><strong>Humidity<\/strong><\/td>\n<\/tr>\n<tr>\n<td>1,300 \u33a1<br \/>\n(Sub FAB 1,300 \u33a1)<\/td>\n<td>\n<div class=\"max_w3\">1000 class \/<br \/>\n100 class<\/div>\n<\/td>\n<td>22 \u2103<\/td>\n<td>55 %<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n[\/vc_column_text][vc_empty_space height=&#8221;56px&#8221;][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;page_overview_map&#8221;][vc_column_inner width=&#8221;2\/5&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_map.jpg\" alt=\"\" width=\"502\" height=\"350\" \/>[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;3\/5&#8243;][vc_column_text]\n<ul class=\"overview_map\">\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info01.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Wet station<\/span><br \/>\n<span class=\"t2\">Acid I Solvent I Alkali<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info02.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Thinfilm &amp; Etch<\/span><br \/>\n<span class=\"t2\">P-CVD I ALD I<br \/>\nCCP etcher<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info03.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Diffusion<\/span><br \/>\n<span class=\"t2\">Wet &amp; Dry furnace<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info04.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Packaging<\/span><br \/>\n<span class=\"t2\">Dicing saw I CMP<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info05.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Photo<\/span><br \/>\n<span class=\"t2\">Photo lithography<br \/>\nSpin coater &amp; Bake<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info06.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Thinfilm<\/span><br \/>\n<span class=\"t2\">PVD I Sputter I<br \/>\nE-beam evaporator<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info07.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Thinfilm &amp; Etch<\/span><br \/>\n<span class=\"t2\">Sputter I ICP-RIE<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info08.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Etch<\/span><br \/>\n<span class=\"t2\">RIE I Deep etcher<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info09.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Photo<\/span><br \/>\n<span class=\"t2\">Photo lithography<\/span><\/div>\n<\/li>\n<li><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"\/eng\/wp-content\/uploads\/2026\/06\/overview_map_info10.jpg\" alt=\"\" width=\"128\" height=\"106\" \/>\n<div class=\"txt\"><span class=\"t1\">Sub-Fab<\/span><br \/>\n<span class=\"t2\">Utility I Vacuum pump<br \/>\nExhaust system Scrubber<\/span><\/div>\n<\/li>\n<\/ul>\n[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_separator type=&#8221;normal&#8221; color=&#8221;#cccccc&#8221; up=&#8221;70&#8243; down=&#8221;70&#8243;][vc_column_text]\n<h3>User-Centric Open Fab Operation<\/h3>\n<div class=\"use_fab_wrap\">\n<div class=\"use_fab\">\n<div class=\"tit\">Select \/ Apply for Relevant Training<\/div>\n<ul class=\"bul_dot\">\n<li>Experience: Minimum 5 years ~ Maximum 28 years<\/li>\n<li>Master\u2019s \/ Ph.D. degree or higher: Over 50%<\/li>\n<li>Research equipment technical support, training, and facility management<\/li>\n<\/ul>\n<\/div>\n<div class=\"use_fab\">\n<div class=\"tit\">Proven Self-User System<\/div>\n<ul class=\"bul_dot\">\n<li>Over 19,000 cases of direct usage annually<\/li>\n<li>Self-service equipment usage rate based on operation hours: 80.8% (2025)<\/li>\n<li>Available for direct usage 24 hours a day<\/li>\n<\/ul>\n<\/div>\n<div class=\"use_fab\">\n<div class=\"tit\">Enhanced Safety Management<\/div>\n<ul class=\"bul_dot\">\n<li>Conduct safety training twice a month<\/li>\n<li>Operate safety monitoring and access control systems<\/li>\n<li>For after-hours usage, a minimum 2-person team entry and prior approval are mandatory<\/li>\n<\/ul>\n<\/div>\n<div class=\"use_fab\">\n<div class=\"tit\">Advanced Infrastructure<\/div>\n<ul class=\"bul_dot\">\n<li>Research equipment status (As of 2025): Around 60 types, worth 20 billion KRW<\/li>\n<li>Selected for the 2024 Open Quantum Process Infrastructure Construction Project: Constructing a shared-use research equipment infrastructure worth 20 billion KRW (~2031)<\/li>\n<\/ul>\n<\/div>\n<div class=\"use_fab\">\n<div class=\"tit\">Systematic Training Program<\/div>\n<ul class=\"bul_dot\">\n<li>Regular training once a week per equipment (389 sessions, 2025)<\/li>\n<li>On-demand training provided as needed<\/li>\n<li>Conducted a total of 1,435 sessions \/ 2025 (An increase of 283 sessions compared to the previous year)<\/li>\n<\/ul>\n<\/div>\n<div class=\"use_fab\">\n<div class=\"tit\">External User Support<\/div>\n<ul class=\"bul_dot\">\n<li>Support for long-distance external researchers\u2019 stays (Guest House)<\/li>\n<li>Provide office spaces and waiting areas<\/li>\n<li>Equipment reservation system and equipment usage training<\/li>\n<li>Direct equipment usage available upon acquiring qualifications<\/li>\n<\/ul>\n<\/div>\n<\/div>\n[\/vc_column_text][vc_separator type=&#8221;normal&#8221; color=&#8221;#cccccc&#8221; up=&#8221;70&#8243; down=&#8221;70&#8243;][vc_column_text]\n<h3>Facilities &amp; Equipment \/ Support System<\/h3>\n[\/vc_column_text][vc_empty_space][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq top&#8221;][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4327\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/01_Control-Room.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/01_Control-Room.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/01_Control-Room-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nControl Room[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4328\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/02_Tour-Course.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/02_Tour-Course.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/02_Tour-Course-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nTour Course[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4329\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/03_Tour-Course.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/03_Tour-Course.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/03_Tour-Course-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nTour Course[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq top&#8221;][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4330\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/04_Smock-Room.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/04_Smock-Room.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/04_Smock-Room-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nSmock Room[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4331\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/05_Corridor.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/05_Corridor.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/05_Corridor-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nCorridor[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4332\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/06_Wet-Room.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/06_Wet-Room.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/06_Wet-Room-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWet Room[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq top&#8221;][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4333\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/07_Yellow-Room_1.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/07_Yellow-Room_1.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/07_Yellow-Room_1-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nYellow Room #1[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4334\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/08_Yellow-Room_2.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/08_Yellow-Room_2.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/08_Yellow-Room_2-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nYellow Room #2[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4335\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/09_Yellow-Room_3.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/09_Yellow-Room_3.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/09_Yellow-Room_3-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nYellow Room #3[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq top&#8221;][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4336\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/10_White-Room_1.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/10_White-Room_1.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/10_White-Room_1-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWhite Room #1[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4337\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/11_White-Room_2.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/11_White-Room_2.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/11_White-Room_2-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWhite Room #2[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4338\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/12_White-Room_3.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/12_White-Room_3.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/12_White-Room_3-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWhite Room #3[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq top&#8221;][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4339\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/13_White-Room_4.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/13_White-Room_4.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/13_White-Room_4-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWhite Room #4[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4340\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/14_White-Room_5.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/14_White-Room_5.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/14_White-Room_5-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nWhite Room #5[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-4341\" src=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/15_Sub-Fab.png\" alt=\"\" width=\"386\" height=\"174\" srcset=\"https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/15_Sub-Fab.png 386w, https:\/\/qnfab.unist.ac.kr\/eng\/wp-content\/uploads\/2026\/06\/15_Sub-Fab-300x135.png 300w\" sizes=\"(max-width: 386px) 100vw, 386px\" \/><br \/>\nSub Fab[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_row_inner row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221; el_class=&#8221;overview_eq bt&#8221;][vc_column_inner width=&#8221;1\/5&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_p01.jpg\" alt=\"\" width=\"220\" height=\"220\" \/><\/p>\n<div class=\"txt\"><span class=\"t1\">Photolithography Process<\/span><br \/>\n<span class=\"t2\">MEMS \/ NEMS pattern formation and pre-lift-off processes<br \/>\n<\/span><\/div>\n[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;2\/5&#8243;][vc_column_text]\n<div class=\"img_col2\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_p02.jpg\" alt=\"\" width=\"220\" height=\"220\" \/><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_p03.jpg\" alt=\"\" width=\"220\" height=\"220\" \/><\/div>\n[\/vc_column_text][vc_column_text]\n<div class=\"txt\"><span class=\"t1\">Thin Film Deposition &amp; Etching Process<\/span><br \/>\n<span class=\"t2\">Deposition of non-metallic insulating thin films (oxide, nitride, dielectric films, etc.) and formation of dry-etched structures<\/span><\/div>\n[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/5&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_p04.jpg\" alt=\"\" width=\"220\" height=\"220\" \/><\/p>\n<div class=\"txt\"><span class=\"t1\">Device Characterization<\/span><br \/>\n<span class=\"t2\">Contact \/ non-contact, electrical characterization, and image measurement &amp; analysis using custom-fabricated specimens<\/span><\/div>\n[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/5&#8243;][vc_column_text]<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full\" src=\"https:\/\/qnfab.unist.ac.kr\/wp-content\/uploads\/2026\/06\/overview_p05.jpg\" alt=\"\" width=\"220\" height=\"220\" \/><\/p>\n<div class=\"txt\"><span class=\"t1\">Wet Cleaning Process<\/span><br \/>\n<span class=\"t2\">Specimen surface cleaning using chemicals and wet etching<\/span><\/div>\n[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/vc_column][\/vc_row]\n","protected":false},"excerpt":{"rendered":"<p>[vc_row row_type=&#8221;row&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221;][vc_column][vc_column_text] Welcome Message Organization Overview Statistics [\/vc_column_text][\/vc_column][\/vc_row][vc_row row_type=&#8221;section&#8221; type=&#8221;grid&#8221; text_align=&#8221;left&#8221; video=&#8221;&#8221; el_class=&#8221;page_overview&#8221;][vc_column][vc_column_text el_class=&#8221;table_scroll&#8221;] Quantum-Nano FAB Center Affiliation Category Personnel Location Cleanroom UNIST Office of Research Facilities and Training Fabrication and Manufacturing Support Team Quantum-Nano FAB Director (Team Leader): 1 Director (Team Leader):&#8230;<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"full_width.php","meta":{"footnotes":""},"acf":[],"_links":{"self":[{"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/pages\/2500"}],"collection":[{"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/comments?post=2500"}],"version-history":[{"count":14,"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/pages\/2500\/revisions"}],"predecessor-version":[{"id":4342,"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/pages\/2500\/revisions\/4342"}],"wp:attachment":[{"href":"https:\/\/qnfab.unist.ac.kr\/eng\/wp-json\/wp\/v2\/media?parent=2500"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}